Jones Pupil Measurement Method of Lithographic Projection Lens

Zejiang Meng; Sikun Li; Xiangzhao Wang; Yang Bu; Chaoxing Yang

doi:10.3788/AOS201939.0312004

Acta Optica Sinica, Volume. 39, Issue 3, 0312004(2019)

Jones Pupil Measurement Method of Lithographic Projection Lens

Zejiang Meng^1,2, Sikun Li^1,2、*, Xiangzhao Wang^1,2、*, Yang Bu^1,2, and Chaoxing Yang^1,2

¹ Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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Zejiang Meng, Sikun Li, Xiangzhao Wang, Yang Bu, Chaoxing Yang. Jones Pupil Measurement Method of Lithographic Projection Lens[J]. Acta Optica Sinica, 2019, 39(3): 0312004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Sep. 6, 2018

Accepted: Nov. 19, 2018

Published Online: May. 10, 2019

The Author Email:

DOI:10.3788/AOS201939.0312004

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