Optics and Precision Engineering, Volume. 10, Issue 2, 143(2002)
Dynamic analysis on a novel nanopositioning stage driven by PZT
References(3)
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic analysis on a novel nanopositioning stage driven by PZT[J]. Optics and Precision Engineering, 2002, 10(2): 143
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