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Acta Photonica Sinica, Volume. 51, Issue 3, 0330001(2022)

Analysis and Research on Spectral Confocal Displacement Measurement Method Based on GRNN

Chunyan LI, Gengpeng LI^*, Jihong LIU, Dou LUO, and Jiayi LIU

Author Affiliations

School of Electronic Engineering，Xi'an University of Posts & Telecommunications，Xi'an 710121，China

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References (15)

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References(15)

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[4] Qing YU, Kun ZHANG, Changcai CUI et al. Method of thickness measurement for transparent specimens with chromatic confocal microscopy. Applied Optics, 57, 9722-9728(2018).

[5] Xicong ZOU, Xuesen ZHAO, Li GUO et al. Noncontact on-machine measurement using a chromatic confocal probe for an ultra-precision turning machine. The International Journal of Advanced Manufacturing Technology, 90, 2163-2172(2017).

[6] Jiao JIAO, Xinghui LI, Qian ZHOU et al. Improved chromatic confocal displacement-sensor based on a spatial-bandpass-filter and an X-shaped fiber-coupler. Optics Express, 27, 10961-10973(2019).

[7] Bo PENG, Xinghua QU, Fumin ZHANG et al. Absolute angle and glass thickness measurement based on dispersive interferometry. IEEE Photonics Technology Letters, 31, 1285-1288(2019).

[8] Wenlong LU, Cheng CHEN, Jian WANG et al. Characterization of the displacement response in chromatic confocal microscopy with a hybrid radial basis function network. Optics Express, 27, 22737-22752(2019).

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Chunyan LI, Gengpeng LI, Jihong LIU, Dou LUO, Jiayi LIU. Analysis and Research on Spectral Confocal Displacement Measurement Method Based on GRNN[J]. Acta Photonica Sinica, 2022, 51(3): 0330001

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Paper Information

Category:

Received: Sep. 16, 2021

Accepted: Nov. 4, 2021

Published Online: Apr. 8, 2022

The Author Email: LI Gengpeng (lgp15535563573@163.com)

DOI:10.3788/gzxb20225103.0330001

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology