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Optics and Precision Engineering, Volume. 15, Issue 9, 1398(2007)

Curvature measurement of micro cantilever based on phase-stepping microscopic interferometry

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]1
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Curvature measurement of micro cantilever based on phase-stepping microscopic interferometry[J]. Optics and Precision Engineering, 2007, 15(9): 1398

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    Received: Dec. 29, 2006

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology