Infrared and Laser Engineering, Volume. 49, Issue 2, 213002(2020)

Characterization of nanofilm parameters based on hybrid optimization algorithm

Lei Lihua1...2,*, Zhang Xinyin1,2, Wu Junjie1, Li Zhiwei1, Li Qiang3, Liu Na1, Xie Zhangning2, Guan Yuqing2, and Fu Yunxia12 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(9)

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    [2] [2] Foozieh S, Seyedeh M. Optical detection of brain activity using plasmonic ellipsometry technique[J]. Sensors & Amp; Actuators: B Chemical, 2017, 251(12): 56-61.

    [3] [3] Mangesh D, Kyunam P, Jihun M, et al. Characterization of wafer-scale MoS2 and WSe2 2D films by spectroscopic ellipsometry[J]. Current Applied Physics, 2017, 17(10): 66-72.

    [4] [4] Petr J, Stanislav S, Karel P, et al. Spectroscopic ellipsometry characterization of spinc-oated Ge25S75 chalcogenide thin films[J]. Pure and Applied Chemistry, 2017, 89(4): 85-92.

    [5] [5] Wu J J, Ding G Q, Chen X, et al. Nano step height measurement using an optical method[J]. Sensors and Actuators: A, 2017, 257: 92-97.

    [6] [6] Jindal S, Bulusu S. A transferable artificial neural network model for atomic forces innanoparticles[J]. The Journal of Chemical Physics, 2018, 149(19): 22-31.

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    [8] [8] Tong G, Tao H, Shu A, et al. Ellipsometric study on optical properties of hydrogen plasma-treated aluminum-doped ZnO thin film[J]. Vacuum, 2019, 163(2): 37-42.

    [9] [9] Michihata M, Takaya Y, Hayashi T. Nano position sensing based on laser trapping technique for flat surfaces[J]. Measurement Science and Technology, 2008, 19(8): 080413-1-7.

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    Lei Lihua, Zhang Xinyin, Wu Junjie, Li Zhiwei, Li Qiang, Liu Na, Xie Zhangning, Guan Yuqing, Fu Yunxia. Characterization of nanofilm parameters based on hybrid optimization algorithm[J]. Infrared and Laser Engineering, 2020, 49(2): 213002

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    Paper Information

    Category: 光电测量

    Received: Jan. 1, 2020

    Accepted: Feb. 1, 2020

    Published Online: Mar. 10, 2020

    The Author Email: Lihua Lei (leilh@simt.com.cn)

    DOI:10.3788/irla202049.0213002

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