Acta Optica Sinica, Volume. 34, Issue 2, 212003(2014)
Microstructure Surface Topography Measurement Based on Color Images of White Light Interferometry
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Guo Tong, Li Feng, Ni Lianfeng, Chen Jinping, Fu Xing, Hu Xiaotang. Microstructure Surface Topography Measurement Based on Color Images of White Light Interferometry[J]. Acta Optica Sinica, 2014, 34(2): 212003
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Aug. 8, 2013
Accepted: --
Published Online: Jan. 23, 2014
The Author Email: Tong Guo (guotong@tju.edu.cn)
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