Fig. 1. Measurement setup for surface temperature of ceramic heater

Fig. 2. Temperature histories of various points on surface of ceramic heater

Fig. 3. Geometric model of heating module

Fig. 4. Experimental devices of Si₃N₄ ceramic heater

Fig. 5. Structure of even-heat block

Fig. 6. Analysis of heat transfer in heating stage

Fig. 7. Verification of repeatability of temperature measurement

Fig. 8. Temperature histories of measurement points from P1 to P12 in 180-second constant voltage heating test

Fig. 9. Thermophysical properties of copper

Fig. 10. Mesh of heating module

Fig. 11. Temperature distribution on upper surface of even-heat block under constant-voltage heating for 180 s

Fig. 12. Comparison of simulation and constant-voltage heating experimental results

Fig. 13. Comparison of simulation and experimental results when heating for 180 s

Fig. 14. Geometric meaning of factors

Fig. 15. Influence of various factors on heating rate

Fig. 16. Influence of various factors on temperature uniformity

Fig. 17. Optimized structure of even-heat block

Fig. 18. Temperature histories of measurement points from P1 to P12 in 180-second constant voltage heating test

Fig. 19. Comparison of temperature uniformity before and after optimization

Fig. 20. Heating to 700 ℃ under control

Fig. 21. Hot embossing machine

Fig. 22. Surface topography of silicon carbide mold and glass microstructure arrays