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Optics and Precision Engineering, Volume. 23, Issue 8, 2117(2015)

Plane holographic varied-line-space grating for DCLS in EUV region

JIANG Yan-xiu1...2,*, Bayanheshig1, ZHAO Xu-long1,2, YANG Shuo1,2 and WU Na1 |Show fewer author(s)
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    JIANG Yan-xiu, Bayanheshig, ZHAO Xu-long, YANG Shuo, WU Na. Plane holographic varied-line-space grating for DCLS in EUV region[J]. Optics and Precision Engineering, 2015, 23(8): 2117

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    Paper Information

    Received: Sep. 25, 2014

    Accepted: --

    Published Online: Oct. 22, 2015

    The Author Email: Yan-xiu JIANG (jiangyanxiup@163.com)

    DOI:10.3788/ope.20152308.2117

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology