Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet

Runze Qi; Jinlong Zhang; Jiali Wu; Shuangying Li; Qiushi Huang; Zhong Zhang; Zhanshan Wang

doi:10.3788/AOS202242.1134003

Acta Optica Sinica, Volume. 42, Issue 11, 1134003(2022)

Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet

Runze Qi, Jinlong Zhang, Jiali Wu, Shuangying Li, Qiushi Huang, Zhong Zhang, and Zhanshan Wang^*

Key Laboratory of Advanced Micro-Structured Materials, Ministry of Education, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

show less

Abstract Get PDF(in Chinese)

Cited By

Article index updated:May. 24, 2024

Citation counts are provided from Researching.

The article is cited by 3 article(s) from Researching.

Tools

Get Citation

Copy Citation Text

Runze Qi, Jinlong Zhang, Jiali Wu, Shuangying Li, Qiushi Huang, Zhong Zhang, Zhanshan Wang. Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet[J]. Acta Optica Sinica, 2022, 42(11): 1134003

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: X-Ray Optics

Received: Mar. 1, 2022

Accepted: Apr. 7, 2022

Published Online: Jun. 3, 2022

The Author Email: Wang Zhanshan (wangzs@tongji.edu.cn)

DOI:10.3788/AOS202242.1134003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology