Extreme ultraviolet (EUV) and vacuum ultraviolet (VUV) high-performance thin film optical elements greatly improve the capability of high-precision observation, and contribute to the development of astronomy, materials, physics, and other disciplines. According to the different application requirements as well as physical and chemical properties of materials, the Institute of Precision Optical Engineering (IPOE) in Tongji University has successfully developed amounts of high-performance thin film mirrors, such as Mg/SiC, Sc/Si, Yb/Al, Al+LiF+eMgF₂, and LaF₃/MgF₂, which can meet the requirements of application in whole EUV and VUV wavelength ranges (25--200 nm). These mirrors are already applied to domestic large-scale scientific instrument (from ground to space). This paper briefly introduces the research progress obtained by IPOE during the development of EUV and VUV thin film optical elements.