Researching | Research of dynamic error compensation for nano-positioning system based on grey model

Optics and Precision Engineering, Volume. 14, Issue 1, 89(2006)

Research of dynamic error compensation for nano-positioning system based on grey model

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)

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[1] SUN Shi-zheng, PENG Dong-lin, ZHENG Fang-yan, WU Liang. Compensation for dynamic measurement errors of time grating sensor[J]. Optics and Precision Engineering, 2015, 23(4): 1114

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of dynamic error compensation for nano-positioning system based on grey model[J]. Optics and Precision Engineering, 2006, 14(1): 89

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Received: Sep. 25, 2005

Accepted: --

Published Online: Feb. 18, 2008

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology