Acta Optica Sinica, Volume. 32, Issue 9, 912002(2012)
Analysis of Phase-Distribution Effect of Moiré Fringes on Alignment Precision
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Zhu Jiangping, Hu Song, Yu Junsheng. Analysis of Phase-Distribution Effect of Moiré Fringes on Alignment Precision[J]. Acta Optica Sinica, 2012, 32(9): 912002
Category: Instrumentation, Measurement and Metrology
Received: Mar. 5, 2012
Accepted: --
Published Online: Jul. 4, 2012
The Author Email: Jiangping Zhu (zsyioe@163.com)