Optoelectronics Letters, Volume. 18, Issue 7, 440(2022)

A reconstruction method of AFM tip by using 2 μm lattice sample

Xiaodong ZHANG... Lin ZHAO, Zhiguo HAN, Xiaoqing XU, Suoyin LI and Aihua WU* |Show fewer author(s)
Author Affiliations
  • Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
  • show less
    References(12)

    [1] [1] HAN G, LI H, ZOU Y. Image reconstruction method of grating atomic force microscope based on blind reconstruction of tip:CN110749751A[P]. 2020-02-04.

    [2] [2] WU T, LV L, ZOU Y, et al. Image reconstruction of TGZ3 grating by eliminating tip-sample convolution effect in AFM[J]. Micro & nano letters, 2020, 15(15):1167-1172.

    [3] [3] HAN G, WU T, LV L, et al. Super-resolution AFM imaging based on enhanced convolutional neural network[J]. Nano, 2021, 16(12):2150147.

    [4] [4] YUAN S, DONG Z, MIAO L, et al. Research on the reconstruction of fast and accurate AFM probe model[J]. Chinese science bulletin, 2010, (24):5.

    [5] [5] HAN G, CAO S, WANG X, et al. Blind evaluation of AFM tip shape by using optical glass surface with irregular nanostructures as a tip characterizer[J]. Micro & nano letters, 2017, 12(12):916-919.

    [6] [6] ZHANG X, LI S, HAN Z, et al. Effect analysis of surface metal layer on step height standard[J]. Modern physics letters B, 2021:2140006.

    [7] [7] WU Z, CAI Y, WANG X, et al. Amorphous Si critical dimension structures with direct Si lattice calibration[J]. Chinese physics B, 2019, 28(3):030601.

    [8] [8] ZHAO L, ZHANG X, LI S, et al. Discussion on calibration method of scanning electron microscope based on line spacing standard samples[J]. Computer and digital engineering, 2021, 49(04):644-648.

    [9] [9] ZHANG X, LI S, HAN Z, et al. A lattice measuring method based on integral imaging technology[J]. Optoelectronics letters, 2021, 17(5):313-316.

    [10] [10] XU L, GUO Q, QIAN S, et al. Self-adaptive grinding for blind tip reconstruction of AFM diamond probe[J]. Nanotechnology and precision engineering, 2018, (2): 150-155.

    [11] [11] TEIMOURI M. Blind reconstruction of punctured convolutional codes[J]. Physical communication, 2021, 47: 101297.

    [12] [12] HAN Z, LI S, FENG Y, et al. Design and preparation of nanoscale linewidth standard samples[J]. Computer and digital engineering, 2021, 49(4):5.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Xiaodong, ZHAO Lin, HAN Zhiguo, XU Xiaoqing, LI Suoyin, WU Aihua. A reconstruction method of AFM tip by using 2 μm lattice sample[J]. Optoelectronics Letters, 2022, 18(7): 440

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Jan. 19, 2022

    Accepted: Mar. 25, 2022

    Published Online: Jan. 20, 2023

    The Author Email: Aihua WU (aihua.wu@139.com)

    DOI:10.1007/s11801-022-2009-6

    Topics