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Optics and Precision Engineering, Volume. 25, Issue 12, 3048(2017)

Parylene-enhanced SAW sensor and its temperature response

LI Jing1...2, PAN Hai-xi3, GUO Zhen1, LI Chuan-yu1, YAO Jia1 and ZHOU Lian-qun1 |Show fewer author(s)
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  • 3[in Chinese]
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    LI Jing, PAN Hai-xi, GUO Zhen, LI Chuan-yu, YAO Jia, ZHOU Lian-qun. Parylene-enhanced SAW sensor and its temperature response[J]. Optics and Precision Engineering, 2017, 25(12): 3048

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    Received: May. 19, 2017

    Accepted: --

    Published Online: Jan. 10, 2018

    The Author Email:

    DOI:10.3788/ope.20172512.3048

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology