Journal of Atmospheric and Environmental Optics, Volume. 9, Issue 4, 323(2014)

Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam

Hong-feng MA*... Bo YAN, Gao-yao WEI and Cheng-hua SUI |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    MA Hong-feng, YAN Bo, WEI Gao-yao, SUI Cheng-hua. Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam[J]. Journal of Atmospheric and Environmental Optics, 2014, 9(4): 323

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 18, 2013

    Accepted: --

    Published Online: Jul. 30, 2014

    The Author Email: Hong-feng MA (mark54746929@163.com)

    DOI:10.3969/j.issn.1673-6141.2014.04.012

    Topics