Journal of Atmospheric and Environmental Optics, Volume. 9, Issue 4, 323(2014)
Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam
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MA Hong-feng, YAN Bo, WEI Gao-yao, SUI Cheng-hua. Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam[J]. Journal of Atmospheric and Environmental Optics, 2014, 9(4): 323
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Received: Oct. 18, 2013
Accepted: --
Published Online: Jul. 30, 2014
The Author Email: Hong-feng MA (mark54746929@163.com)