Journal of Atmospheric and Environmental Optics, Volume. 9, Issue 4, 323(2014)
Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam
In an effort to extend the stroke of micro-actuators in micro-deformable mirrors, out-of-plane actuators with curved electrode and clamped-clamped beam are investigated. The static behaviors of actuators are solved by using the Rayleigh-Ritz method. During the calculation, tension stress and residual stress were considered. By studying the effects in stroke of actuators with different electrode shapes, actuators with a 500 μm long beam with a maximum stroke of 14.1 μm are obtained when subjected to the voltage of 300 V.
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MA Hong-feng, YAN Bo, WEI Gao-yao, SUI Cheng-hua. Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam[J]. Journal of Atmospheric and Environmental Optics, 2014, 9(4): 323
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Received: Oct. 18, 2013
Accepted: --
Published Online: Jul. 30, 2014
The Author Email: Hong-feng MA (mark54746929@163.com)