Acta Photonica Sinica, Volume. 49, Issue 8, 0831002(2020)
Study on Properties of Fluorine-oxide Composite Films
Figures & Tables(8)
Fig. 1. The refractive index and extinction coefficient curve of the films
Fig. 4. The AFM images of the single-component and composite thin films
Table 1. Preparation process parameters
View tableView in ArticleTable 1. Preparation process parameters
Filmogen Evaporation method Electron beam current/mA Resistance current/A Substrate temperature/℃ Base pressure /Pa Working pressure/Pa Oxygen flow rate/sccm SiO2 Electron beam 40 180 3.0×10-3 1.3×10-2 1.9 YF3 Resistance 150 180 3.0×10-3 7.3×10-3 / TiO2 Electron beam 100 180 3.0×10-3 2.8×10-2 3.2
Table 2. The mechanical parameters of the thin films
View tableView in ArticleTable 2. The mechanical parameters of the thin films
Samples Thickness/nm Power/nm Stress/GPa Substrate / -0.173 / SiO2 307.5 -255.937 -0.4 YF3 308.1 255.224 0.4 TiO2 281.4 1 520.499 3.9 SiO2/YF3 306.2 1 162.851 1.9 TiO2/YF3 285.5 459.022 0.8
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Yun-yun SHI, Jun-qi XU, Jun-hong SU. Study on Properties of Fluorine-oxide Composite Films[J]. Acta Photonica Sinica, 2020, 49(8): 0831002
Paper Information
Category: Thin Films
Received: Mar. 1, 2020
Accepted: Jun. 1, 2020
Published Online: Nov. 27, 2020
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