Optics and Precision Engineering, Volume. 15, Issue 12, 1921(2007)

Research of oxygen activation by synchrotron radiation in optical component cleaning process

[in Chinese]1... [in Chinese]2, [in Chinese]2, [in Chinese]2 and [in Chinese]1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(10)

    [1] [1] ROSENBERG R A,LOVE P J,REHN V.Polarization-dependent C(K)near-edge X-ray absorption fine structure of graphite[J].Phys.Rev.B,1986,33:4034-4037.

    [2] [2] ROSENBERG R A,MANCINI D C.Deposition of carbon on gold using synchrotron radiation[J].Nucl.Instr.and Meth.B,1990,A291:101-106.

    [3] [3] XU X D,ZHOU H J,HONG L Y,et al..Cleaning of contaminated optics devices by synchrotron radiation[J].Vacuum Science and Technology,2000,20(2):114-119.

    [4] [4] QIAN H J,LIU F Q,TAO X P,et al..In-situ optical components cleaning by glow discharge[J].Vacuum Science and Technology,2001,21(2):147-149.

    [5] [5] WARBURTON W,PIANETTA P.In-Situ optical element cleaning with photon activated oxygen[J].Nucl lnstr and Meth B.1992.A319:240-243.

    [6] [6] E.E.KOCH and B.F.SONNTAG.Synchrotron Radiation:Techniques and Applications[M].New York:springer,1979.

    [7] [7] SAMSON J A R,EDERER D L.Vacuum Ultraviolet Spectroscopy I[M].USA:Academic Press,1998.

    [8] [8] LIDE D R.Handbook of Chemistry and Physics[M].Boca Raton:CRC Press,2000.

    [9] [9] HATANO Y.Interaction of VUV photons with molecules spectroscopy and dynamics of molecular superexcited states[J].Journal of Electron Spectroscopy and Related Phenomena,2001,119:107-125.

    [10] [10] CHANG J S,KEIIY A J,CROWLEY J M.Handbook of Electrostatic Processes[M].New York:MarcelDekker Inc.1995.

    CLP Journals

    [1] SONG Yuan, LU Qi-peng, GONG Xue-peng, WANG Yi, PENG Zhong-qi. Cleaning of carbon contamination on multilayer optics of EUVL[J]. Optics and Precision Engineering, 2017, 25(11): 2835

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of oxygen activation by synchrotron radiation in optical component cleaning process[J]. Optics and Precision Engineering, 2007, 15(12): 1921

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Aug. 20, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

    The Author Email:

    DOI:

    Topics