Fig. 1. Schematic diagram of acceleration sensor structure and parameters

Fig. 2. Vibration model of acceleration sensor

Fig. 3. The effects of e₂ and h on the sensitivity and resonant frequency of the sensor

Fig. 4. The effects of hinge parameter c and t on the sensitivity and resonant frequency of the sensor

Fig. 5. Simulation diagram

Fig. 6. Harmonic response analysis

Fig. 7. The system of sensor calibration

Fig. 8. The time domain curve of sensor

Fig. 9. The frequency response curve of sensor

Fig. 10. The sensitivity curve of sensor

Fig. 11. The transverse anti-jamming test of sensor