Principle and Technology of Laser Super-Diffraction Lithography

Zixin Liang; Yuanyuan Zhao; Xuanming Duan

doi:10.3788/LOP202259.0922029

Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922029(2022)

Principle and Technology of Laser Super-Diffraction Lithography

Zixin Liang, Yuanyuan Zhao, and Xuanming Duan^*

Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou 511443, Guangdong , China

show less

Abstract Get PDF(in Chinese)

Cited By

Article index updated:May. 23, 2024

Citation counts are provided from Researching.

The article is cited by 2 article(s) from Researching.

Tools

Get Citation

Copy Citation Text

Zixin Liang, Yuanyuan Zhao, Xuanming Duan. Principle and Technology of Laser Super-Diffraction Lithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922029

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Feb. 14, 2022

Accepted: Mar. 23, 2022

Published Online: May. 10, 2022

The Author Email: Duan Xuanming (xmduan@jun.edu.cn)

DOI:10.3788/LOP202259.0922029

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology