Infrared and Laser Engineering, Volume. 47, Issue 8, 818006(2018)
Three-dimensional polarization aberration of deep ultraviolet lithographic projection lens
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He Wenjun, Jia Wentao, Feng Wentian, Zheng Yang, Liu Zhiying, Fu Yuegang. Three-dimensional polarization aberration of deep ultraviolet lithographic projection lens[J]. Infrared and Laser Engineering, 2018, 47(8): 818006
Paper Information
Category: 光学设计及仿真
Received: Mar. 5, 2018
Accepted: Apr. 3, 2018
Published Online: Aug. 29, 2018
The Author Email: Wenjun He (hewenjun@cust.edu.cn)
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