Microelectronics, Volume. 53, Issue 3, 506(2023)
Design of an A-type Upper Electrode MEMS Single Pole Three Throw Switch in the L-E Band
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NING Chaodong, ZHAN Yongxin, WU Qiannan, WANG Junqiang, LI Mengwei. Design of an A-type Upper Electrode MEMS Single Pole Three Throw Switch in the L-E Band[J]. Microelectronics, 2023, 53(3): 506
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Received: Jun. 19, 2022
Accepted: --
Published Online: Jan. 3, 2024
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