Microelectronics, Volume. 53, Issue 3, 506(2023)

Design of an A-type Upper Electrode MEMS Single Pole Three Throw Switch in the L-E Band

NING Chaodong1...2,3, ZHAN Yongxin1,2,3, WU Qiannan2,3,4, WANG Junqiang1,2,3, and LI Mengwei1,23 |Show fewer author(s)
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    NING Chaodong, ZHAN Yongxin, WU Qiannan, WANG Junqiang, LI Mengwei. Design of an A-type Upper Electrode MEMS Single Pole Three Throw Switch in the L-E Band[J]. Microelectronics, 2023, 53(3): 506

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    Received: Jun. 19, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220230

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