[1] [1] MALACARA D. Optical shop testing［M］. Wiley, 1992.

[2] [2] PHILLION D W. General methods for generating phaseshifting interferometry algorithms［J］. Applied Optics, 1997, 36(31): 8098-8115.

[3] [3] LIU Bo, GUO Jianying, SUN Yongquan. Modeling control for PZT microdisplacement actuator［J］. Optics Precision Engineering, 2013, 21(6): 1503-1509.

[4] [4] MILLERD J, BROCK N, HAYES J, et al. Modern approaches in phase measuring metrology［C］. SPIE, 2005, 5856: 14-22.

[5] [5] TAKEDA M. Temporal versus spatial carrier techniques for heterodyne interferometry［C］. SPIE, 1987, 813: 329-330.

[6] [6] TAKEDA M. Spatialcarrier fringepattern analysis and its applications to precision interferometry and profilometry: An overview［J］. Industrial Metrology, 1990, 1(2): 79-99.

[7] [7] CHATTERJEE S, KUMAR Y P, BHADURI B. Measurement of surface figure of plane optical surfaces with polarization phaseshifting Fizeau interferometer［J］. Optics & Laser Technology, 2007, 39(2): 268-274.

[8] [8] CHATTERJEE S, KUMAR Y P. Polarization phaseshifting Fizeau interferometer with a cyclic path optical configuration［J］. Optical Engineering, 2009, 48(11): 115601.

[9] [9] BROCK N, HAYES J, KIMBROUGH B, et al. Dynamic Interferometry［C］. SPIE, 2005, 5875: 58750F.

[10] [10] MILLERD J, BROCK N, HAYES J, et al. Pixelated phasemask dynamic interferometry［C］. SPIE, 2004, 5531: 304-314.

[11] [11] YANG Jun, LIU Zhihai, YU AN Libo. Effects of wave plate on nonlinear errors in polarization laser interferometer［J］. Acta Photonica Sinica, 2008, 37(2): 364-369.

[12] [12] LI Xia, YUAN Yan, ZHAO Jianke. Microstress instal lation and experiment result of the interferometer［J］. Acta Photonica Sinica, 2007, 36(5): 918-921.

[13] [13] ZHAO C, KANG D, BURGE J H. Effects of birefringence on Fizeau interferometry that uses a polarization phaseshifting technique［J］. Applied Optics, 2005, 44(35): 7548-7553.

[14] [14] GHOSH N, OTANI Y, BHATTACHARYA K. Generation of collinearly propagating orthogonally polarized beams［J］. Optik, 2011, 122(13): 1164-1168.

[15] [15] MENESESFABIAN C, RIVERAORTEGA U. Phaseshifting interferometry by wave amplitude modulation: general case［J］. Optics and Lasers in Engineering, 2012, 50(7): 905-909.

[16] [16] RIVERAORTEGA U, MENESESFABIAN C, RODRIGUEZZURITA G. Inhomogeneous phasevisibility modulating interferometry by space onoff nonquadrature amplitude modulation［J］. Optics Express, 2013, 22(15): 17421-17434.

[17] [17] REN Huan, MA Li, LIU Xu, et al. Optical element test with multiple surface interference［J］. Optics Precision Engineering, 2013, 21(5): 1145-1150.

[18] [18] GU Yuan, PAN Yingjun, HUANG Shanglian. Measuring method of pressureinduced birefringence in singlemode fibre based on the detecting technology of state of polarization［J］. Acta Optica Sinica, 1997, 26(8): 703-706.