Acta Optica Sinica, Volume. 40, Issue 2, 0216001(2020)
Three-Dimensional Reconstruction Technology of Subsurface Defects in Fused Silica Optical Components
Subsurface defects directly affect the imaging quality and laser damage threshold of fused silica optical components. In comparison with the two-dimensional cross-section size and depth of the defect, the quantitative detection results of the three-dimensional contour of the subsurface defect and its volume can facilitate a more accurate evaluation of the processing quality of the fused silica optical component. In this work, a tomography scanning experiment of the fused silica sample is performed using a confocal microscope based on the principle of confocal microscope. Moreover, a three-dimensional reconstruction algorithm for the subsurface defects of fused silica components is proposed based on the analysis of the characteristics of subsurface defect images. The proposed algorithm outperforms other reconstruction methods in terms of efficiency and accuracy. Based on the statistical results of the reconstructed defects, the complete three-dimensional information of the subsurface defects of the fused silica samples is quantitatively obtained.
Get Citation
Copy Citation Text
Jianpu Zhang, Huanyu Sun, Shiling Wang, Jin Huang, Xiaoyan Zhou, Fengrui Wang, Hongjie Liu, Dong Liu. Three-Dimensional Reconstruction Technology of Subsurface Defects in Fused Silica Optical Components[J]. Acta Optica Sinica, 2020, 40(2): 0216001
Category: Materials
Received: Jul. 22, 2019
Accepted: Sep. 19, 2019
Published Online: Jan. 2, 2020
The Author Email: Liu Dong (liudongopt@zju.edu.cn)