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Spectroscopy and Spectral Analysis, Volume. 33, Issue 9, 2562(2013)

Optical Emission Spectroscopy of MPCVD Plasma

MA Zhi-bin*, WU Jian-peng, TAO Li-ping, CAO Wei, LI Guo-wei, and WANG Jian-hua
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    MA Zhi-bin, WU Jian-peng, TAO Li-ping, CAO Wei, LI Guo-wei, WANG Jian-hua. Optical Emission Spectroscopy of MPCVD Plasma[J]. Spectroscopy and Spectral Analysis, 2013, 33(9): 2562

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    Paper Information

    Received: Jan. 15, 2013

    Accepted: --

    Published Online: Sep. 30, 2013

    The Author Email: Zhi-bin MA (mazb@mail.wit.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2013)09-2562-04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology