Chinese Optics Letters, Volume. 20, Issue 11, 111301(2022)

Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors

Hailong Han1,2, Hao Li1,2, Lixing You1,2, and Xiaoping Liu3、*
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences (CAS), Shanghai 200050, China
  • 2CAS Center for Excellence in Superconducting Electronics (CENSE), Shanghai 200050, China
  • 3School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
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    Figures & Tables(5)
    Flowchart of the fabrication processes.
    SEM images of our prepared sample. (a) Side view before laser illumination, (b) and (c) side view and top view after laser illumination, and (d) zoom-in view of the edge after laser illumination.
    AFM image of the fabricated silicon spherical microcavity.
    (a) Transmission spectrum of the microcavity coupled with the fiber taper from 1515 to 1525 nm; (b) the Lorentzian fit (solid red line) of the measured spectrum around the resonant wavelength at 1519.6 nm (solid black line), showing a Q-factor of 3.5 × 105.
    • Table 1. Main Parameters of Bosch Processes

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      Table 1. Main Parameters of Bosch Processes

      1st Bosch Process2nd Bosch Process
      Passivation time/cycleEtching time/cyclePassivation time/cycleEtching time/cycle
      0.8 s1.7 s7 s24.5 s
      Number of cycles: 60Number of cycles: 1
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    Hailong Han, Hao Li, Lixing You, Xiaoping Liu. Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors[J]. Chinese Optics Letters, 2022, 20(11): 111301

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    Paper Information

    Category: Integrated Optics

    Received: Apr. 13, 2022

    Accepted: Jun. 6, 2022

    Published Online: Jul. 14, 2022

    The Author Email: Xiaoping Liu (liuxp1@shanghaitech.edu.cn)

    DOI:10.3788/COL202220.111301

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