Design and fabrication of wide angle phase control mirror

Daqi Li; Baojian Liu; Deming Yu; Weibo Duan; Dingquan Liu

doi:10.3788/IRLA20230721

Infrared and Laser Engineering, Volume. 53, Issue 4, 20230721(2024)

Design and fabrication of wide angle phase control mirror

Daqi Li^1,2, Baojian Liu^1,2,3, Deming Yu^1,2, Weibo Duan^1,2,4、*, and Dingquan Liu^1,2

¹Optical Thin Film and Materials Research Laboratory, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²Shanghai Key Laboratory of Optical Coatings and Spectral Modulation, Shanghai 200083, China

³Department of Optical Science and Engineering, School of Information Science and Engineering, Fudan University, Shanghai 200433, China

⁴College of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(12)

Fig. 1. Optical system diagram of quantum science experiment satellite key communicator

Download full size

View in Article

Fig. 2. Reflectance design curve (a) and phase difference design curve (b) of phase control mirror

Download full size

View in Article

Fig. 3. Sensitivity of each layer in the mirror

Download full size

View in Article

Fig. 4. Phase difference error analysis curves under 37.5° incidence (a), 45° incidence (b), 52.5° incidence (c)

Download full size

View in Article

Fig. 5. Schematic diagram of ellipsometer test

Download full size

View in Article

Fig. 6. Reflectance (a) and phase difference (b) test curves

Download full size

View in Article

Table 1. Technical index of mirror
View table
View in Article
Table 1. Technical index of mirror
Technical index Value
Target wavelength/nm 780
Range of incidence angle/(°) 45±7.5
Reflectance ≥99%
Phase difference/(°) ≤3

Table 2. Design result of reflectance and phase difference at target wavelength (780 nm)
View table
View in Article
Table 2. Design result of reflectance and phase difference at target wavelength (780 nm)
Incidence angle/(°) Reflectance Phase difference/(°)
37.5 99.62% 0.22
45 99.57% 0.34
52.5 99.46% 1.09

Table 3. Phase difference error analysis at target wavelength (780 nm)
View table
View in Article
Table 3. Phase difference error analysis at target wavelength (780 nm)
Incidence angle/(°) Error +1% Error 0% Error −1%
37.5 0.51 0.22 0.017
45 1.326 0.34 0.654
52.5 2.14 1.09 0.291

Table 4. Deposition process parameters
View table
View in Article
Table 4. Deposition process parameters
Parameter Value
Nb₂O₅ SiO₂
Rate/nm·s⁻¹ 0.15 0.8
EB oxygenation/sccm 40 30
RF bias voltage/V 600 600
RF discharged current/mA 500 500
Background pressure/Pa 2×10⁻³ 2×10⁻³
Baking temperature/℃ 200 200

Table 5. Test result of reflectance and phase difference at target wavelength (780 nm)
View table
View in Article
Table 5. Test result of reflectance and phase difference at target wavelength (780 nm)
Incidence angle/(°) Reflectance Phase difference/(°)
37.5 99.60% 0.46
45 99.47% 0.36
52.5 99.36% 2.83

Table 6. Reliability and durability results of mirror
View table
View in Article
Table 6. Reliability and durability results of mirror
Experiment Result
Adhesion experiment Pass
Soaking experiment （45±1 ℃） Pass
High (50±1 ℃) and low (−25±1 ℃) temperature experiment Pass
Temperature (45±2 ℃) and humidity (95%) experiment Pass

Tools

Get Citation

Copy Citation Text

Daqi Li, Baojian Liu, Deming Yu, Weibo Duan, Dingquan Liu. Design and fabrication of wide angle phase control mirror[J]. Infrared and Laser Engineering, 2024, 53(4): 20230721

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites