Optical Instruments, Volume. 45, Issue 5, 11(2023)
Method to improve the accuracy of spectral confocal measurement based on Kalman filtering algorithm
Figures & Tables(7)
Fig. 5. Analysis of four important error fitting parameters in Voigt fitting
Table 1. Comparison of the three fitting methods
View tableView in ArticleTable 1. Comparison of the three fitting methods
拟合方法 位置 迭代次数 中心峰值/nm 拟合R2 Gaussian 4 24 525.00 0.98384 8 18 561.50 0.99286 12 15 574.45 0.99194 16 16 579.28 0.99093 20 7 583.86 0.98349 Lorentz 4 14 528.74 0.98744 8 15 562.11 0.97993 12 17 574.73 0.98576 16 23 579.47 0.98726 20 6 584.17 0.98630 Voigt 4 20 525.00 0.99082 8 27 562.12 0.99451 12 46 574.32 0.99364 16 35 580.55 0.99284 20 12 584.17 0.98923
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Bin ZHAO, Xiaoxiao MAO, Shencheng TIAN, Yan CAO, Xiangmei DONG, Xiumin GAO. Method to improve the accuracy of spectral confocal measurement based on Kalman filtering algorithm[J]. Optical Instruments, 2023, 45(5): 11
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Received: Dec. 19, 2022
Accepted: --
Published Online: Dec. 27, 2023
The Author Email: GAO Xiumin (gxm@usst.edu.cn)
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