Acta Optica Sinica, Volume. 37, Issue 3, 322003(2017)
Design and Experiment of Active Compensation System for Thermal Aberration of Lithographic Lens
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Dong Lijian, Cui Qinglong, Li Pengzhi, Zhao Lei. Design and Experiment of Active Compensation System for Thermal Aberration of Lithographic Lens[J]. Acta Optica Sinica, 2017, 37(3): 322003
Paper Information
Category: Optical Design and Fabrication
Received: Oct. 22, 2016
Accepted: --
Published Online: Mar. 8, 2017
The Author Email: Lijian Dong (donglj@ciomp.ac.cn)
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