Optoelectronics Letters, Volume. 12, Issue 1, 8(2016)

Preparation and characterization of In0.82Ga0.18As PIN photodetectors

Xia LIU1...2, Lian-zhen CAO1,2,*, Huai-xin LU1, Ying-de LI1, Hang SONG2 and Hong JIANG2 |Show fewer author(s)
Author Affiliations
  • 1Shandong Provincial Key Laboratory of Multi-photon Entanglement and Manipulation, Department of Physics and Optoelectronic Engineering, Weifang University, Weifang 261061, China
  • 2Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
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    Using two-step growth method and buffer layer annealing treatment, the double heterojunction structures of In0.82Ga0.18epilayer capped with InAs0.6P0.4layer were prepared on InP substrate by low pressure metal organic chemical vapor deposition (LP-MOCVD). Based on the high quality In0.82Ga0.18As structures, the In0.82Ga0.18PIN photodetector with cut-off wavelength of 2.56 μm at room temperature was fabricated by planar semiconductor technology, and the device performance was investigated in detail. The typical dark current at the reverse bias VR=10 mV and the resistance area product R0A are 5.02 μA and 0.29 Ω·cm2at 296 K and 5.98 nA and 405.2 Ω·cm2at 116 K, respectively. The calculated peak detectivities of the In0.82Ga0.18As photodetector are 1.21×1010cm·Hz1/2/W at 296 K and 4.39×1011cm·Hz1/2/W at 116 K respectively, where the quantum efficiency η=0.7 at peak wavelength is supposed. The results show that the detection performance of In0.82Ga0.18As prepared by two-step growth method can be improved greatly.

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    LIU Xia, CAO Lian-zhen, LU Huai-xin, LI Ying-de, SONG Hang, JIANG Hong. Preparation and characterization of In0.82Ga0.18As PIN photodetectors[J]. Optoelectronics Letters, 2016, 12(1): 8

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    Paper Information

    Received: Nov. 17, 2015

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Lian-zhen CAO (lianzhencao@wfu.edu.cn)

    DOI:10.1007/s11801-016-5228-x

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