Optics and Precision Engineering, Volume. 28, Issue 12, 2655(2020)
D esign of six -axis force piezoelectric sen sor w ith sp ok e structure
Aiming at the robot's feedback to the working environment for realizing automatic operation, a piezoelectric six-axis force sensor was designed. Specifically, an eight-fulcrum spoke six-axis force sensor structure combined with the principle of multipoint measurement was proposed herein. Quartz was em. ployed as the piezoelectric material in the force-sensing device. The advantage of such a sensor is its strong decoupling, light weight, large range, and high natural frequency. The parametric modeling of this sensor was carried out using the ANSYS finite element software. The measurement principle of the eight-fulcrum sensor’s feasibility was verified through a six-axis force quasi-static simulation. Moreover, a quasi-static and dynamic calibration experimental platform was built to conduct the calibration experiment. The experi. mental results show that for the proposed sensor, the nonlinearity is less than 0. 5%, inter-dimensional in. terference is more than 4%, and natural frequency is over 6 kHz. From the theoretical analysis and experi. mental results, we confirmed that the sensor structure could complete the six-axis force measurement and that the coupling between the dimensions was eliminated. The demand for dynamic measurement was thus fulfilled. The proposed sensor’s structure provides the theoretical and design bases for the design of light weight large range sensors, which is of important reference significance for the design and development of other types of piezoelectric six-axis force sensors.
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XU Xing-sheng, LI Ying-jun, WANG Gui-cong, SUN Xuan, SUN Yang. D esign of six -axis force piezoelectric sen sor w ith sp ok e structure[J]. Optics and Precision Engineering, 2020, 28(12): 2655
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Received: Sep. 10, 2020
Accepted: --
Published Online: Jan. 19, 2021
The Author Email: Ying-jun LI (me_liyj@ujn.edu.cn)