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Acta Optica Sinica, Volume. 35, Issue 3, 322007(2015)

Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing

Bai Yang1,2、*, Zhang Feng1, Li Longxiang1,2, Zheng Ligong1, and Zhang Xuejun1
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    Article index updated:May. 23, 2024

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    Bai Yang, Zhang Feng, Li Longxiang, Zheng Ligong, Zhang Xuejun. Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing[J]. Acta Optica Sinica, 2015, 35(3): 322007

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 15, 2014

    Accepted: --

    Published Online: Feb. 4, 2015

    The Author Email: Yang Bai (baiyang5406@sina.com)

    DOI:10.3788/aos201535.0322007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology