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Acta Photonica Sinica, Volume. 44, Issue 4, 414001(2015)

The Real-time Supply Technology of Working Gas in Rare-gas Halide Excimer Laser

LIANG Xiao-lin1,*... BAO Ben-gang1 and DAI Qing-li2 |Show fewer author(s)
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  • 2[in Chinese]
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    LIANG Xiao-lin, BAO Ben-gang, DAI Qing-li. The Real-time Supply Technology of Working Gas in Rare-gas Halide Excimer Laser[J]. Acta Photonica Sinica, 2015, 44(4): 414001

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    Paper Information

    Received: Oct. 8, 2014

    Accepted: --

    Published Online: Apr. 28, 2015

    The Author Email: Xiao-lin LIANG (liangxiaolin0405@sina.com)

    DOI:10.3788/gzxb20154404.0414001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology