Journal of Semiconductors, Volume. 43, Issue 10, 102501(2022)
Integration of high-performance spin-orbit torque MRAM devices by 200-mm-wafer manufacturing platform
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Hongchao Zhang, Xiangyue Ma, Chuanpeng Jiang, Jialiang Yin, Shuqin Lyu, Shiyang Lu, Xiantao Shang, Bowen Man, Cong Zhang, Dandan Li, Shuhui Li, Wenjing Chen, Hongxi Liu, Gefei Wang, Kaihua Cao, Zhaohao Wang, Weisheng Zhao. Integration of high-performance spin-orbit torque MRAM devices by 200-mm-wafer manufacturing platform[J]. Journal of Semiconductors, 2022, 43(10): 102501
Category: Articles
Received: May. 25, 2022
Accepted: --
Published Online: Nov. 18, 2022
The Author Email: Liu Hongxi (hongxi_liu@tmc-bj.cn), Wang Gefei (gefei_wang@tmc-bj.cn), Cao Kaihua (kaihua.cao@buaa.edu.cn)