Optics and Precision Engineering, Volume. 20, Issue 11, 2373(2012)
Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers
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DENG Yuan-long, LI Xue-jin, GENG You-fu, HONG Xue-ming. Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers[J]. Optics and Precision Engineering, 2012, 20(11): 2373
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Received: Jun. 1, 2012
Accepted: --
Published Online: Nov. 28, 2012
The Author Email: Yuan-long DENG (dengyL@szu.edu.cn)
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