Piezoelectrics & Acoustooptics, Volume. 42, Issue 1, 118(2020)
Characteristic Analysis of Lever-coupled Micromachined Gyroscope
References(1)
[7] [7] ZEIMPEKIS I,SARI I,KRAFT M.Deflection amplification mechanism in a capacitive accelerometer ［C］//Bejin,China:Proceedings of the 16th International on Solid_State Sensors,Actoators and Microsystems Conference,2011:1096-1099.
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PENG Shigang, LIU Haipeng, GAO Shiqiao, JIN Lei, LI Zezhang. Characteristic Analysis of Lever-coupled Micromachined Gyroscope[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 118
Paper Information
Received: Jun. 29, 2019
Accepted: --
Published Online: Apr. 21, 2022
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