Opto-Electronic Engineering, Volume. 47, Issue 8, 200209(2020)
The research progress of surface interferometric measurement with higher accuracy
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Hou Xi, Zhang Shuai, Hu Xiaochuan, Quan Haiyang, Wu Gaofeng, Jia Xin, He Yiwei, Chen Qiang, Wu Fan. The research progress of surface interferometric measurement with higher accuracy[J]. Opto-Electronic Engineering, 2020, 47(8): 200209
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Received: Jun. 5, 2020
Accepted: --
Published Online: Oct. 28, 2020
The Author Email: Xi Hou (hxxh6776@163.com)