Optics and Precision Engineering, Volume. 21, Issue 6, 1531(2013)
Fabrication of three-dimensional silicon profile by wet etching
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LI Yong-qian, LI Wei, GUO Yong-jun, SU Lei. Fabrication of three-dimensional silicon profile by wet etching[J]. Optics and Precision Engineering, 2013, 21(6): 1531
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Received: Dec. 28, 2012
Accepted: --
Published Online: Jul. 1, 2013
The Author Email: Yong-qian LI (liyq.nwpu@gmail.com)
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