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Optics and Precision Engineering, Volume. 26, Issue 5, 1275(2018)

Three-dimensional microscopic reconstruction of MEMS based on multi image fusion

DING Xun1...2, ZHAO Yue-jin1 and DING Yu-kui3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DING Xun, ZHAO Yue-jin, DING Yu-kui. Three-dimensional microscopic reconstruction of MEMS based on multi image fusion[J]. Optics and Precision Engineering, 2018, 26(5): 1275

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    Received: Sep. 11, 2017

    Accepted: --

    Published Online: Aug. 14, 2018

    The Author Email:

    DOI:10.3788/ope.20182605.1275

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology