Heteroepitaxy of semiconductor thin films

Journal of Semiconductors, Volume. 40, Issue 6, 060401(2019)

Yi Gu^1,2

¹State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

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Fig. 1. (Color online) (a) Schematic atomic geometry and (b) schematic epitaxial structure of GaAs thin film on graphene-coated Si substrate^[3].

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Yi Gu. Heteroepitaxy of semiconductor thin films[J]. Journal of Semiconductors, 2019, 40(6): 060401

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Published Online: Sep. 18, 2021

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