Acta Optica Sinica, Volume. 31, Issue 11, 1122003(2011)
Magnification Tolerancing and Compensation for the Lithographic Projection Lens
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Xu Weicai, Huang Wei, Yang Wang. Magnification Tolerancing and Compensation for the Lithographic Projection Lens[J]. Acta Optica Sinica, 2011, 31(11): 1122003
Category: Optical Design and Fabrication
Received: May. 6, 2011
Accepted: --
Published Online: Oct. 21, 2011
The Author Email: Weicai Xu (xuweicaixx@163.com)