Acta Optica Sinica, Volume. 42, Issue 11, 1134010(2022)
Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers
Figures & Tables(3)
Fig. 1. Analysis and comparisons of characteristics of BBO, LBO, and CLBO crystals used for generating 193 nm laser by sum frequency. (a) Phase matching angle; (b) effective nonlinear coefficient; (c) acceptance angle; (d) walk-off angle
Table 4. Partial commercially available solid-state 193-nm lasers
View tableTable 4. Partial commercially available solid-state 193-nm lasers
Country Company Parameter Reference Xiton Wavelength is 193.368 nm, power is 10 mW, pulse width is ~10 ns, and repetition frequency is 1--15 kHz [72] Germany Toptica Continuous wave with wavelength of 193 nm and power of about 1 mW [73] A.P.E Wavelength is 192--215 nm, and repetition frequency is 80 MHz [74] Japan Nikon Wavelength is 193.4 nm, power is 100 mW, pulse width is 1.5 ns, repetition frequency is 400 kHz, and mass factor M2<2.5 [75] Actinix Wavelength is 188 nm, and pulse energy is 2mJ Wavelength is 193 nm, power is 35 mW, and repetition frequency is 5 kHz [76] America Opotek Wavelength is 193--210 nm, pulse width is 6 ns, repetition frequency is 20 Hz, and pulse energy is 0.1--0.8 mJ [77]
Table 5. TPA coefficient β at different ultraviolet wavelengths
View tableTable 5. TPA coefficient β at different ultraviolet wavelengths
Item Material Bandgap /eV TPA coefficient β /(cm·GW-1) Reference 266 nm 248 nm 213 nm 193 nm KBBF 8.4 - - - 1.3 [82] CLBO 6.9 0.45 0.53 - 1.0 [82-84] Crystal BBO 6.56 0.93 0.5 (o), 0.34 (e) 2.43 - [85] LBO 7.74 0.15 - 1.03 - [86] MgF2 11.8 - 0.0013 0.004 0.19 [87-88] Substrate CaF2 10 - 0.0083 0.3 0.4 [87-88] Fused silica 7.8 0.017 0.045 0.5 0.3 [87-88]
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Zhigang Zhao, Hongwen Xuan, Jingchong Wang, Zhenhua Cong, Xingyu Zhang, Yohei Kobayashi, Zhaojun Liu. Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers[J]. Acta Optica Sinica, 2022, 42(11): 1134010
Paper Information
Category: X-Ray Optics
Received: Feb. 9, 2022
Accepted: Apr. 7, 2022
Published Online: Jun. 3, 2022
The Author Email: Xuan Hongwen (xuanhw@aircas.ac.cn), Liu Zhaojun (zhaojunliu@sdu.edu.cn)
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