Acta Optica Sinica, Volume. 42, Issue 11, 1134010(2022)
Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers
The development status of vacuum-ultraviolet (VUV) solid-state 193-nm laser sources is reviewed in this paper, including the related nonlinear crystals (e.g., BBO, LBO, CLBO, KBBF) and their characteristics, the development of 193-nm band continuous solid-state laser and pulsed solid-state laser in recent tens of years, the combinations of fundamental lasers used for generation of 193-nm solid laser, and their merits and drawbacks. The two-photon absorption phenomenon is described, which has influence on the transmission of the nonlinear crystals and the output power of ultraviolet laser. The effect of laser induced contamination in deep ultraviolet lasers is discussed, and some possible ways to avoid or alleviate this effect are also given. Finally, the difficulties and challenges of realizing high repetition rate deep ultraviolet lasers are evaluated.
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Zhigang Zhao, Hongwen Xuan, Jingchong Wang, Zhenhua Cong, Xingyu Zhang, Yohei Kobayashi, Zhaojun Liu. Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers[J]. Acta Optica Sinica, 2022, 42(11): 1134010
Category: X-Ray Optics
Received: Feb. 9, 2022
Accepted: Apr. 7, 2022
Published Online: Jun. 3, 2022
The Author Email: Xuan Hongwen (xuanhw@aircas.ac.cn), Liu Zhaojun (zhaojunliu@sdu.edu.cn)