Fig. 1. Structure diagram of the sensor

Fig. 2. Equivalent mechanical model of inertial accelerometer

Fig. 3. Amplitude frequency response curve of inertial sensor vibration system

Fig. 4. The mechanical model of sensor

Fig. 5. Diagram of beam deformation

Fig. 6. Mode shape diagram of sensor

Fig. 7. Simulated amplitude-frequency response curve at the maximum amplitude position of the sensor

Fig. 8. Experimental system diagram

Fig. 9. Amplitude-frequency curve of sensor 1 and sensor 2

Fig. 10. Time domain diagram and frequency domain diagram of sensor 1 under different excitation conditions

Fig. 11. Time domain diagram and frequency domain diagram of sensor 2 under different excitation conditions

Fig. 12. Sensitivity calibration curves of sensor 1 and sensor 2

Fig. 13. Curve of cross-axis anti-interference characteristics of sensor 1 and sensor 2