Researching | Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Infrared and Laser Engineering, Volume. 50, Issue 2, 20200206(2021)

Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Xin Miao^1,2, Hangfeng Li¹, Yunhai Zhang^1,2, Famin Wang^1,2, and Xin Shi³

Author Affiliations

¹University of Science and Technology of China, Hefei 230026, China

²Jiangsu Key Laboratory of Medical Optics, Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163, China

³The Second Affiliated Hospital of Soochow University, Suzhou 215000, China

show less

Abstract Get PDF(in Chinese)

Figures&Tables (17)

Paper Information

Figures & Tables(17)

Fig. 1. [in Chinese]

Download full size

View in Article

Fig. 2. [in Chinese]

Download full size

View in Article

Fig. 3. [in Chinese]

Download full size

View in Article

Fig. 4. [in Chinese]

Download full size

View in Article

Fig. 5. [in Chinese]

Download full size

View in Article

Fig. 6. [in Chinese]

Download full size

View in Article

Fig. 7. [in Chinese]

Download full size

View in Article

Fig. 8. [in Chinese]

Download full size

View in Article

Fig. 9. [in Chinese]

Download full size

View in Article

Fig. 10. [in Chinese]

Download full size

View in Article

Fig. 11. [in Chinese]

Download full size

View in Article

Fig. 12. [in Chinese]

Download full size

View in Article

Fig. 13. [in Chinese]

Download full size

View in Article

Fig. 14. [in Chinese]

Download full size

View in Article

Fig. 15. [in Chinese]

Download full size

View in Article

Fig. 16. [in Chinese]

Download full size

View in Article

Fig. 17. [in Chinese]

Download full size

View in Article

Tools

Get Citation

Copy Citation Text

Xin Miao, Hangfeng Li, Yunhai Zhang, Famin Wang, Xin Shi. Analysis and correction of image distortion in MEMS galvanometer scanning confocal system[J]. Infrared and Laser Engineering, 2021, 50(2): 20200206

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Image processing

Received: Oct. 12, 2020

Accepted: --

Published Online: Mar. 24, 2021

The Author Email:

DOI:10.3788/IRLA20200206

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology