Researching | Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Infrared and Laser Engineering, Volume. 50, Issue 2, 20200206(2021)

Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Xin Miao1...2, Hangfeng Li1, Yunhai Zhang1,2, Famin Wang1,2 and Xin Shi3 |Show fewer author(s)

Author Affiliations

¹University of Science and Technology of China, Hefei 230026, China

²Jiangsu Key Laboratory of Medical Optics, Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163, China

³The Second Affiliated Hospital of Soochow University, Suzhou 215000, China

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Xin Miao, Hangfeng Li, Yunhai Zhang, Famin Wang, Xin Shi. Analysis and correction of image distortion in MEMS galvanometer scanning confocal system[J]. Infrared and Laser Engineering, 2021, 50(2): 20200206

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Paper Information

Category: Image processing

Received: Oct. 12, 2020

Accepted: --

Published Online: Mar. 24, 2021

The Author Email:

DOI:10.3788/IRLA20200206

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology