Optics and Precision Engineering, Volume. 13, Issue 1, 65(2005)

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[4] [4] FRANK J,KOOPMANN H,CHEN W. Design and performance of a high force piezoelectric inchworm actuator[J]. SPIE,1999, 3668:717-723.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2005, 13(1): 65

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Received: Nov. 21, 2004

Accepted: --

Published Online: Nov. 26, 2007

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