High-accuracy Small-angle Rotary Measurement Based on Multiple-reflection in Plane Mirrors

DENG Li-xin; TAN Ji-chun; FAN Qing-chun; YANG Jian-kun; GUO Hui; DAI Sui-an

doi:10.3969/j.issn.1003-501x.2010.01.05

Opto-Electronic Engineering, Volume. 37, Issue 1, 25(2010)

High-accuracy Small-angle Rotary Measurement Based on Multiple-reflection in Plane Mirrors

DENG Li-xin1,*... TAN Ji-chun1, FAN Qing-chun2, YANG Jian-kun1, GUO Hui1 and DAI Sui-an1 |Show fewer author(s)

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¹[in Chinese]

²[in Chinese]

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[2] [2] Chun-Jen Chen,Psang Dain Lin. High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology [J]. Optical Engineering(S0091-3286),2007,46(11):113604(1-8).

[3] [3] Kun-Huang Chen,Jing-Heng Chen,Ching-Hwa Cheng,et al. Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry [J]. Optical Engineering(S0091-3286),2009,48(4):043606(1-6).

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[5] [5] ZHOU Wei-dong,CAI Li-long.Interferometer for small-angle measurement based on total internal reflection [J]. Applied Optics(S0003-6935),1998,37(25):5957-5963.

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DENG Li-xin, TAN Ji-chun, FAN Qing-chun, YANG Jian-kun, GUO Hui, DAI Sui-an. High-accuracy Small-angle Rotary Measurement Based on Multiple-reflection in Plane Mirrors[J]. Opto-Electronic Engineering, 2010, 37(1): 25

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