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Optics and Precision Engineering, Volume. 11, Issue 5, 448(2003)

[in Chinese]

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[3] [3] MACOY N H, BROBERG H. Dynamic alignment design and assessment for scanning interferometers[J]. SPIE, 1996, 2832:126-154.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2003, 11(5): 448

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Paper Information

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Received: Apr. 17, 2003

Accepted: --

Published Online: Nov. 3, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology