[1] [1] He Miao, Yi Xinjian, Cheng Zuhai. Fabrication of Si concave microlenses array［J］. J. Infrared Millim. Waves, 2002, 21(1): 33～36

[2] [2] Li Ming, Chen Guanghua, Zhao wei et al.. Concave microlens arrays produced by femtosecond laser with HF acid etching［J］. Acta Photonica Sinica, 2009, 38(3): 547～550

[3] [3] Yang Xiuwen, Zhu Shengxiang, Xie Hong et al.. A method for fabrication of micro-lens array［J］. Optoelectronic Technology, 2003, 23(3): 170～181

[4] [4] Tao Chen, Tong Wang, Zhen Wang et al.. Microlens fabrication using an excimer laser and the diaphragm method［J］. Opt. Express, 2009, 17(12): 9733～9747

[5] [5] Tao Chen, Tong Wang, Jimin Chen et al.. Microlens fabrication with fiber laser induced thermal-mechanical plastic forming method［C］. ICALEO 2009 proceedings, 810～816

[6] [6] R.F. Shyu, C. T. Pan, S. C. Lin. Parametric study of spherical microlens array［J］. Materials Science Forum, 2006, 505～507: 595～600

[7] [7] Sebastian Scheiding, Andreas Gebhardt, Ramona Eberhardt et al.. Microlens array milling on large wafers［J］. Micro-Optics, 2009, 4: 41～45

[8] [8] T. H. Lin, H. Yang, C. K. Chao. New high fill-factor triangular micro-lens array fabrication method using UV proximity printing［J］. DTIP of Mems & Moems, 2008, 9(11): 187～191

[9] [9] Du Chunlei, Lin Dajian, Feng Beru et al.. Microlens array fabrication by using laser direct lithography System［J］. Acta Optica Sinica, 1996, 16(8): 1194～1196

[10] [10] Zhang Xinyu, Tang Qingle, Zhang Zhi et al.. Concave refractive microlens arrays fabricated by Ion beam etching［J］. Acta Optica Sinica, 2001, 21(4): 485～490

[11] [11] Wang Wei, Zhou Changhe. New Technology for Fabrication of Polymer Microlens Arrays［J］. Chinese J. Lasers, 2009, 36(11): 2869～2872

[12] [12] Zhu Ruilin, Zou Shaoming, Xu Li. The relation between different curve curvature of liquid surface［J］. Chemical Equipment Technological, 2007, 28(5): 65～66