Researching | New Design of Angle-Variable Spectroscopic Ellipsometer (RPA type)

Acta Optica Sinica, Volume. 15, Issue 4, 492(1995)

New Design of Angle-Variable Spectroscopic Ellipsometer (RPA type)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. New Design of Angle-Variable Spectroscopic Ellipsometer (RPA type)[J]. Acta Optica Sinica, 1995, 15(4): 492

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jul. 8, 1993

Accepted: --

Published Online: Aug. 17, 2007

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology